Specialty Gas LOX — high-purity liquid oxygen for demanding applications
Specialty gas LOX refers to liquid oxygen supplied at a higher purity and with tighter control of impurities than ordinary technical grades. REAL GAZ offers it for users in analysis, electronics and advanced manufacturing who care about trace contaminants.
Hydrocarbons, moisture and particulates are of special concern in oxygen service, so these lots receive extra analytical attention.
Hydrocarbons, moisture and particulates are of special concern in oxygen service, so these lots receive extra analytical attention.
Analysis follows ISO 17025 laboratory practice, ISO 8573 principles for contaminant classes, EN 13458 and ISO 21029, suitable for semiconductor, analytical and research customers.
Specification discussion is part of the service. Typical points to agree are minimum purity, maximum moisture, hydrocarbon limit and particle content. We then plan filling, sampling and analysis so that the result can be checked on arrival. Oxygen purity at specialty level is usually stated as 99.5 per cent or better, with hydrocarbons and moisture reported in parts per million, so the data fits your incoming inspection routine. We encourage customers to share their drawings or process descriptions, because contamination risks are easier to prevent at the design stage than to correct once the line is in operation.
🏭 Where Specialty LOX Is Used
- ⚙️ Semiconductor oxidation — controlled oxygen grows silicon dioxide layers on wafers where impurities would degrade device performance;
- 🔬 Fibre-optic preforms — oxygen reacts with silicon tetrachloride in preform deposition, where trace water must remain extremely low;
- 🏥 Analytical reference — vaporised oxygen is used as a reference or oxidant in elemental and combustion analysers;
- 🚀 Plasma and coating processes — oxygen is a reactive component in sputtering and plasma cleaning chambers.
💡 Why Choose REAL GAZ
- ✅ Higher purity grade — reduced levels of moisture, hydrocarbons and other trace species protect sensitive processes;
- 🧪 Lot-specific data — analysis results are issued per lot so that quality teams can link a delivery to a process record;
- 🎯 Dedicated handling — clean vessels and hoses reserved for specialty duty limit the risk of cross-contamination;
- 🔒 Technical dialogue — we discuss the impurities that matter most to your process before recommending a specification;
- 📄 Certificate of Analysis (CoA) — supplied with every order.
🔬 Quality Control & Safety
- trace moisture and hydrocarbon analysis;
- particulate control during filling and transfer;
- dedicated oxygen-clean vessels and hoses;
- leak testing and pressure-relief verification.
Cylinders and vessels comply with ADR / UN transport rules and relevant EN/ISO standards.
⚙️ Trusted Gas Solutions
If your process calls for specialty gas LOX, REAL GAZ can document the exact specification, supply analysis results and organise delivery to your plant or cleanroom service area. Our experts support customers in Azerbaijan, Turkey, Georgia, Uzbekistan and the USA who need dependable cryogenic oxygen.
REAL GAZ — Specialty oxygen, specified precisely.